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Star-Type Large Volume Microwave Plasma System

Country/Region china
Company Chengdu Newman-Hueray Microwave Tech. Co.,ltd
Categories Plasma Source
Telephone +86-28-8421 5166 +86-28-8421 5598
ICP License Issued by the Chinese Ministry
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    Star-Type Large Volume Microwave Plasma System

    Star-Type Large Volume Microwave Plasma System
    Author:admin  From:HUE-RAY MICROWAVE  hits:244  Update:2007-11-7

    HMPS-210010KW/2450MHz

    Star-Type Large Volume Microwave Plasma System

     Features:

    • The newly developed MPG-2100 10kW/2450MHz microwave power sources with programmable control system provides adjustable output power from 1.0 to 10.0kW with low ripple and precisely regulation.
    • The special designed star-type large volume microwave cavity as the reacting applicator is the outstanding one we recent developed. It has very promise to excite an intense spatially stable plasma where the substrates be placed and realize a large volume and more substrates films MPCVD with stable operation.
    • Built in high vacuum system and three fine MFC systems.
    • With Sample supporter moveable and temperature auto control
    • Application: MPCVD research and middle-mass production for diamond or various kinds of films.

    Specification

    Type

    HMPS-2100

    Microwave Power Source

    HMG-2100 10 x 1 kW

    Frequency

    2450±50MHz

    Power Output

    1 - 10kWContinue Adjustable

    Cooling Water

    8L/min

    Leakage:

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