Semiconductor Industry Usage Cylinder Gas Wf6 Tungsten Hexafluoride

Product Description

WF6 refers to tungsten hexafluoride, which is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. Here are some key points about WF6:

1. Chemical Formula: WF6
2. Molecular Weight: 297.84 g/mol
3. Structure: Tungsten hexafluoride has an octahedral molecular geometry, with the tungsten atom at the center and six fluorine atoms arranged around it.
4. Physical Properties: Tungsten hexafluoride is a colorless, corrosive gas. It has a strong, pungent odor and is highly reactive.
5. Chemical Reactivity: WF6 is a highly reactive compound. It readily reacts with water vapor in the air to form tungsten oxide and hydrogen fluoride. It is also reactive with many other substances, including metals, reducing agents, and organic compounds.
6. Applications: Tungsten hexafluoride has various applications primarily in the semiconductor industry. It is used as a precursor in the chemical vapor deposition (CVD) process to deposit tungsten films onto semiconductor substrates. These films are essential for the fabrication of thin-film transistors and interconnects in integrated circuits.
7. Safety Considerations: Tungsten hexafluoride is a toxic and corrosive substance. It can cause severe burns to the skin, eyes, and respiratory tract upon contact. Inhalation of the gas or its decomposition products can be harmful. Strict safety measures and proper protective equipment should be used when handling and working with WF6.
8. Storage and Handling: Due to its reactivity and corrosiveness, tungsten hexafluoride is typically stored and handled in specialized containers made of materials resistant to the corrosive effects of the compound, such as nickel or stainless steel.
9. Environmental Impact: Tungsten hexafluoride is not considered a significant environmental hazard. However, its use and disposal should be in accordance with local regulations and best practices to minimize any potential impact.